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MS Excel Spreadsheet - 4.5 MB - MD5: 78e16acbcc03722d50c4ee68781935f5
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Nov 15, 2021
Sardi, Fiammetta, 2021, "Replication Data for: Scalable production of solid-immersion lenses for quantum emitters in silicon carbide", https://doi.org/10.18419/DARUS-2083, DaRUS, V1, UNF:6:WT2hLsr015Q+Y9l/lrLoDA== [fileUNF]
Data to replicate the experimental data plots in the paper: Fig. 1d, e: AFM scans of SIL before the etching and after the etching, possibility to see how the mask changed in the etching process; Fig. 2a, b, c: Confoscal scan of the all SIL, g2 measurements of one defect inside the sils and relative ODMR measurements related to Vsi in SiC in the SIL...
Fixed Field Text Data - 4.7 KB - MD5: 914243efe8577c5e7b669c16dd5773c9
Fig. 1d, AFM profile before etching
Fixed Field Text Data - 5.0 KB - MD5: 60164568adf596b23f711ed63613fb16
Fig. 1e, AFM profile after etching
Plain Text - 581.1 KB - MD5: bd5f1519fc20a7884c8a9688954937f4
Fig. 2a PLE scan on one SIL
Tabular Data - 25.6 KB - 4 Variables, 1000 Observations - UNF:6:tvdi1JU3f1T4rWOQUG9Ivw==
Fig. 2b, g2 function
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