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MS Excel Spreadsheet - 18.2 KB - MD5: 408d66db5e32c2946bfc81d8e26046c0
MS Excel Spreadsheet - 2.5 MB - MD5: edb7695520a17ab8fadbbf49a9f71b03
MS Excel Spreadsheet - 31.2 KB - MD5: 9543cc8969e3485078189e7fdd108fa8
MS Excel Spreadsheet - 44.9 KB - MD5: 368e48f2edfdca5a71b967eb09f2606d
Fixed Field Text Data - 4.7 KB - MD5: 914243efe8577c5e7b669c16dd5773c9
Fig. 1d, AFM profile before etching
Fixed Field Text Data - 5.0 KB - MD5: 60164568adf596b23f711ed63613fb16
Fig. 1e, AFM profile after etching
Plain Text - 581.1 KB - MD5: bd5f1519fc20a7884c8a9688954937f4
Fig. 2a PLE scan on one SIL
Tabular Data - 25.6 KB - 4 Variables, 1000 Observations - UNF:6:tvdi1JU3f1T4rWOQUG9Ivw==
Fig. 2b, g2 function
Fixed Field Text Data - 1.4 KB - MD5: 80dc99723bcb267edac3b478828f1895
Fig. 2c, ODMR
Tabular Data - 880 B - 1 Variables, 48 Observations - UNF:6:EGQmOwpQaJcA0aWJAxhxrQ==
Fig. 3a, Count rate statistics
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